IPQC inspection are found on PECVD 1th plug machine when lifting the hand screw loosening lead graphite falling, causing graphite boat damaged 1PCS, boat damage 11PCS.
IPQC line inspection material is found on the No. 1 PECVD inserted machine spreader grip screw loose lead graphite boat fall, causing damage to the graphite boat outside boat 1PCS, within boat damage 11PCS.
IPQC patrol line is found PECVD 1 inserted machine material spreader starting point screw loosening in graphite boat fall, cause 1pcs damaged graphite boat and boat, boat damage 11PCS.